Irradiation/Implantation

Our equipment allows for irradiation and implantation of materials with a wide range of ions with energies from 600 keV up to about 70 MeV (depending on atomic species). The size of the implanted area is restricted to approximately 1.5 cm2. Samples can be heated or cooled during implantation.

For more details please contact Christof Vockenhuber and Arnold Müller.